JPS5295182A - Measurement for high frequency characteristics of transistor wafer - Google Patents

Measurement for high frequency characteristics of transistor wafer

Info

Publication number
JPS5295182A
JPS5295182A JP1198576A JP1198576A JPS5295182A JP S5295182 A JPS5295182 A JP S5295182A JP 1198576 A JP1198576 A JP 1198576A JP 1198576 A JP1198576 A JP 1198576A JP S5295182 A JPS5295182 A JP S5295182A
Authority
JP
Japan
Prior art keywords
high frequency
measurement
frequency characteristics
transistor wafer
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1198576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623385B2 (en]
Inventor
Junichi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1198576A priority Critical patent/JPS5295182A/ja
Publication of JPS5295182A publication Critical patent/JPS5295182A/ja
Publication of JPS623385B2 publication Critical patent/JPS623385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1198576A 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer Granted JPS5295182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1198576A JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1198576A JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Publications (2)

Publication Number Publication Date
JPS5295182A true JPS5295182A (en) 1977-08-10
JPS623385B2 JPS623385B2 (en]) 1987-01-24

Family

ID=11792877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1198576A Granted JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Country Status (1)

Country Link
JP (1) JPS5295182A (en])

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236241A (ja) * 1984-04-30 1985-11-25 カスケード・マイクロテツク・インコーポレイテツド ウエハプローブ
JPS6221068A (ja) * 1985-07-19 1987-01-29 Koichi Yoshida フラツト形探針
JPS62151772A (ja) * 1985-12-20 1987-07-06 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ 高周波回路チップの試験装置
JPS62163984A (ja) * 1985-12-20 1987-07-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 検査装置
JPS62177456A (ja) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針
JPS62177455A (ja) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針
JPS63262849A (ja) * 1987-04-21 1988-10-31 Tokyo Electron Ltd プロ−ブカ−ド
JP2025020045A (ja) * 2023-07-28 2025-02-07 旺▲夕▼科技股▲分▼有限公司 コンタクトプローブ及びその接触子、接触子の製造方法、当該接触子を用いたプローブシステム、パッケージ化されていない半導体装置のテスト方法、ならびに、テストされた半導体装置及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516678A (en]) * 1974-06-28 1976-01-20 Ibm

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516678A (en]) * 1974-06-28 1976-01-20 Ibm

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236241A (ja) * 1984-04-30 1985-11-25 カスケード・マイクロテツク・インコーポレイテツド ウエハプローブ
JPS6221068A (ja) * 1985-07-19 1987-01-29 Koichi Yoshida フラツト形探針
JPS62151772A (ja) * 1985-12-20 1987-07-06 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ 高周波回路チップの試験装置
JPS62163984A (ja) * 1985-12-20 1987-07-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 検査装置
JPS62177456A (ja) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針
JPS62177455A (ja) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針
JPS63262849A (ja) * 1987-04-21 1988-10-31 Tokyo Electron Ltd プロ−ブカ−ド
JP2025020045A (ja) * 2023-07-28 2025-02-07 旺▲夕▼科技股▲分▼有限公司 コンタクトプローブ及びその接触子、接触子の製造方法、当該接触子を用いたプローブシステム、パッケージ化されていない半導体装置のテスト方法、ならびに、テストされた半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS623385B2 (en]) 1987-01-24

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